| Percentage of ±Z readout value | Measurement AC frequency | |||
|---|---|---|---|---|
| DUT impedance | Measurement AC current | 100 Hz, 200 Hz, 500 Hz | 1 kHz, 2 kHz | 5 kHz, 10 kHz |
| 1.0 mΩ to 9.9 mΩ | 500 mArms or more | ±（5% of reading+0.5mΩ） | ±（5%of reading+0.5mΩ） | – |
| 10.0 mΩ to 99.9 mΩ | 250 mArms or more | ±（5% of reading+0.5mΩ） | ±（5%of reading+0.5mΩ） | – |
| 100.0 mΩ to 1000.0 mΩ | 150 mArms or more | ±（2% of reading+0.5mΩ） | ±（3%of reading+0.5mΩ） | – |
